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Design of a hybrid micro/nano cantilever-based resonant sensor and its fabrication method
  • 所属机构名称：清华大学
  • 成果类型：会议
  • 相关项目：基于半导体纳米带的纳机电惯性传感技术研究
同会议论文项目
基于半导体纳米带的纳机电惯性传感技术研究
期刊论文 7 会议论文 5
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