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Research on low temperature anodic bonding based on interface pretreatment of dielectric barrier dis
  • 所属机构名称：苏州大学
  • 时间：2014.12.23
  • 成果类型：会议
  • 相关项目：基于介质阻挡放电的高效低温阳极键合机理及方法研究
作者： Pan Mingqiang|Sun Linning|Wang Yangjun|Liu Jizhu|Chen Tao|Liu Huicong|Chen Liguo|
同会议论文项目
基于介质阻挡放电的高效低温阳极键合机理及方法研究
期刊论文 7 会议论文 5
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Design and development of composite anodic bonding system based on dielectric barrier discharge meth
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