Nanotribological behaviors of friction-induced hillocks on monocrystalline silicon
- 所属机构名称:西南交通大学
- 会议名称:2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NA
- 时间:2012.9.3
- 成果类型:会议
- 相关项目:单晶硅表面摩擦诱导化学磨损的行为、机理及控制研究