位置：成果数据库 > 会议 > 会议详情页
Laser interference lithography of gratings for a surface encoder
  • 所属机构名称：清华大学
  • 会议名称：日本机械学会东北支部第47期总会
  • 成果类型：会议
  • 相关项目：大尺寸二维全息光栅的制作技术
作者： Xinghui Li| Lijiang Zeng| Yuki Shimizu| So Ito|
同会议论文项目
大尺寸二维全息光栅的制作技术
期刊论文 3 会议论文 6
同项目会议论文
Fabrication of large grating using the optical mosaic technique
Fabrication of optical mosaic gratings by consecutive holographic exposures employing a latent-fring
Fabrication of diffraction gratings for surface encoders by using a Lloyd’s mirror interferome
Heterodyne planar grating encoder with high alignment tolerance, especially insensitivity to grating
Fabrication of large mosaic gratings by locking the exposure fringes to the latent gratings