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Electron density and electron energy dependence on driving frequency in capacitively coupled argon p
  • 所属机构名称：苏州大学
  • 会议名称：IWPSA 2010 (International Worshop on Plasma Science and Applications)
  • 成果类型：会议
  • 相关项目：甚高频阵列式容性耦合等离子体源的放电特性及均匀性研究
作者： 徐海鹏|辛煜|张杰|
同会议论文项目
甚高频阵列式容性耦合等离子体源的放电特性及均匀性研究
期刊论文 23 会议论文 5 著作 1
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