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Design and fabrication of a novel PZT films based piezoelectric micromachined ultrasonic transducers
  • 所属机构名称：中国科学院声学研究所
  • 会议名称：2009 International Conference on Measuring Technology and Mechatronics Automation, ICMTMA 2009
  • 成果类型：会议
  • 会场：Zhangjiajie, Hunan, China
  • 相关项目：硅微传声器和微气压传感器及其阵列集成芯片系统研究
作者： Liu, Mengwei|Li, Junhong|Wang, Chenghao|
同会议论文项目
硅微传声器和微气压传感器及其阵列集成芯片系统研究
期刊论文 36 会议论文 5
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