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Micromachined piezoelectric devices for acoustic applications
  • 所属机构名称：清华大学
  • 会议名称：2012 8th IEEE International Conference on Electron Devices and Solid-State Circuits, EDSSC 2012
  • 时间：2012
  • 成果类型：会议
  • 相关项目：集成化射频高Q薄膜体声波谐振器
作者： Ren, Tian-Ling|Shu, Yi|Yang, Yi|Zhou, Chang-Jian|Wang, Yu-Feng|Tian, He|Zhang, Chang-Hai|Sun, Hui|Liu, Xuan|
同会议论文项目
集成化射频高Q薄膜体声波谐振器
期刊论文 38 会议论文 17 专利 17
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