Nanolithography in the evanescent near-field by using gain-assisted meta-materials system
- 所属机构名称:中国科学院光电技术研究所
- 会议名称:5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manu
- 成果类型:会议
- 相关项目:亚波长金属结构中表面等离子体对光刻分辨力的调制特性研究