Analysis on the microstructure of grating mechanical scored Aluminum film and mechanical properties
- 所属机构名称:长春理工大学
- 会议名称:Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO), 2012 International Conferenc
- 时间:2012.8.8
- 成果类型:会议
- 相关项目:衍射光栅机械刻划理论及刀具设计研究