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Design of a SEM compatible slip-stick nano-positioner with high bearing capacity
  • 所属机构名称：哈尔滨工业大学
  • 会议名称：2011 International Conference on Material Science and Information Technology, MSIT2011
  • 时间：2011.9.9
  • 成果类型：会议
  • 相关项目：纳米结构与器件跨尺度三维操纵与互连的基础研究
作者： Rong, Weibin|Yu, Miao|Zhang, Shizhong|Wang, Lefeng|Sun, Lining|
同会议论文项目
纳米结构与器件跨尺度三维操纵与互连的基础研究
期刊论文 46 会议论文 19 获奖 8
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