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The design and simulation study of the electrothermal excitation resonant beam based on slitstructur
  • 所属机构名称：北京航空航天大学
  • 会议名称：2012 the 8th IEEE International Symposium on Instrumentation and Control Technology, ISICT 2012 - Pr
  • 成果类型：会议
  • 相关项目：谐振式硅微结构传感器综合测试分析仪器
作者： HuiChao Shi|Shangchun Fan|Weiwei Xing|
同会议论文项目
谐振式硅微结构传感器综合测试分析仪器
期刊论文 31 会议论文 5 专利 9
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