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Analysis and compensation of shape distortion in UV-LIGA based on partial coherent light theory
  • 所属机构名称：中国科学技术大学
  • 成果类型：会议
  • 相关项目：加速器大功率同轴负载研制及高功率微波吸收材料特性研究
同会议论文项目
加速器大功率同轴负载研制及高功率微波吸收材料特性研究
期刊论文 13 会议论文 9
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