Heat Transfer in Physical Vapor Deposition of Polycrystalline Multilayers and Residual Stress
- 所属机构名称:清华大学
- 会议名称:ASME 2013 Heat Transfer Summer Conference collocated with the ASME 2013 7th International Conference
- 时间:2013
- 成果类型:会议
- 相关项目:三阴极高温等离子体电弧和射流形成及与粒子耦合的综合研究