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Research of etching a novel MEMS gyroscope sensing pendulum
  • 所属机构名称：北京信息科技大学
  • 会议名称：2010 IEEE International Conference on Information and Automation, ICIA 2010
  • 成果类型：会议
  • 相关项目：无驱动结构的微机械陀螺
作者： Liu, Yu1|Sun, Baisheng1|Zhang, Fuxue2|Zhang, Wei2|
同会议论文项目
无驱动结构的微机械陀螺
期刊论文 10 会议论文 33 获奖 2 专利 7 著作 2
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