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Suface microchined mirror based on pre-stress comb-drive actuator
  • 所属机构名称：中国科学院光电技术研究所
  • 会议名称：5th International Conference (16th Annual Conference) of the Chinese Society of Micro-Nano Technolog
  • 时间：2014.10.20
  • 成果类型：会议
  • 相关项目：MEMS三维THz无源器件设计理论研究
作者： Weimin Wang, Shengmei Yan, Qiang Wang|
同会议论文项目
MEMS三维THz无源器件设计理论研究
期刊论文 10 会议论文 6
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