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Design of a SEM compatible slip-stick nano-positioner with high bearing capacity
  • 所属机构名称：哈尔滨工业大学
  • 会议名称：2011 International Conference on Material Science and Information Technology, MSIT2011
  • 成果类型：会议
  • 会场：Singapore, Singapore
  • 相关项目：微系统装配与集成
作者： Wang, Lefeng|Rong, Weibin|Yu, Miao|Sun, Lining|Zhang, Shizhong|
同会议论文项目
微系统装配与集成
期刊论文 25 会议论文 19 专利 4
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