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Effect of gas pressure on the mechanical properties of sputtered TaN films
  • 所属机构名称：哈尔滨工程大学
  • 成果类型：会议
  • 相关项目：纳米压痕理论在表面涂层残余应力检测中的应用研究
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纳米压痕理论在表面涂层残余应力检测中的应用研究
期刊论文 14 会议论文 5
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