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Deposition of AlN thin films on flexible polymer substrates by magnetron sputtering and SAW device f
  • 所属机构名称：清华大学
  • 会议名称：2011 International Conference on Electroceramics
  • 时间：2011.12.12
  • 成果类型：会议
  • 相关项目：集成化射频高Q薄膜体声波谐振器
作者： Jin, Hao|Zhou, Jian|Dong, Shurong|Feng, Bing|Luo, Jikui|Wang, Demiao|
同会议论文项目
集成化射频高Q薄膜体声波谐振器
期刊论文 38 会议论文 17 专利 17
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