Optics optimization of 10um resolution used for the smart phone's PCB and ITO lithography
- 所属机构名称:广东工业大学
- 会议名称:IEEE 2011 International Conference on System Science, Engineering Design and Manufacturing Informati
- 成果类型:会议
- 相关项目:基于拉曼-纳斯声光衍射的新型紫外准分子激光均束器件研究