Evolution of micro-spikes on silicon surface etched by femtosecond laser with different fabrication
- 所属机构名称:上海理工大学
- 会议名称:Conference on Quantum Dots and Nanostructures - Synthesis, Characterization, and Modeling IX
- 时间:2012
- 成果类型:会议
- 相关项目:基于周期量级飞秒激光的紫外精密光谱之啁啾调控研究