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Inductively coupled plasma etching of SOI and its applications in submicron optical waveguide device
  • 所属机构名称：中国科学院半导体研究所
  • 会议名称：Photonics and Optoelectronics Meetings (POEM) 2009 - Optoelectronic Devices and Integration
  • 成果类型：会议
  • 会场：Wuhan, China
  • 相关项目：亚波长表面等离子体激元金属波导与SOI波导集成研究
作者： Fan, Zhongchao|Li, Yuntao|Yang, Fuhua|Yu, Yude|Han, Weihua|Xu, Xuejun|Xiao, Xi|Yu, Jinzhong|Li, Zhiyong|Huang, Qingzhong|Zhu, Yu|
同会议论文项目
亚波长表面等离子体激元金属波导与SOI波导集成研究
期刊论文 1 会议论文 4
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