Simulaiton of the dual frequency capacitively coupled Ar plasma using Fluid model in semiconductor t
- 所属机构名称:浙江理工大学
- 会议名称:4th International Conference on Advanced Design and Manufacturing Engineering(ADME 2014)
- 时间:2014.7.26
- 成果类型:会议
- 相关项目:单隙及多隙虚火花放电击穿机理研究