Determination of B impurities in silicon by inductively coupled plasma emission spectrometry
- 所属机构名称:大连理工大学
- 会议名称:2013 2nd International Conference on Machine Design and Manufacturing Engineering, ICMDME 2013
- 时间:2013
- 成果类型:会议
- 相关项目:Si-Al-Zn三元合金凝固行为对硅中杂质B分凝特性的影响