Model reduction for the electrostatically actuated silicon diaphragm based on modal-type dynamic con
- 所属机构名称:福州大学
- 会议名称:Proceedings of the ASME 2014 International Mechanical Engineering Congress and Exposition(IMECE2014)
- 时间:2014.11
- 成果类型:会议
- 相关项目:覆膜基底与微悬臂梁间粗糙面重复冲击接触-分离的动态接触特性分析