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Single-track absolute position encoding method based on spatial frequency of stripes
  • 所属机构名称：中国科学院上海光学精密机械研究所
  • 会议名称：Proc. SPIE. 9271, Holography, Diffractive Optics, and Applications VI, 92711I
  • 时间：2014.10.11
  • 成果类型：会议
  • 相关项目：多路并行激光直写光栅装置
同会议论文项目
多路并行激光直写光栅装置
期刊论文 29 会议论文 21
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