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A Virtual Metrology Model Based on Recursive Canonical Variate Analysis with Applications to Sputter
  • 所属机构名称：江苏大学
  • 会议名称：10th International Conference on Chemical and Process Engineering
  • 成果类型：会议
  • 相关项目：基于局部建模的大范围工况系统优化控制
作者： Pan, Tian-hong|Wong, David Shan-Hill|Jang, Shi-Shang|
同会议论文项目
基于局部建模的大范围工况系统优化控制
期刊论文 29 会议论文 9 专利 6
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