位置：成果数据库 > 会议 > 会议详情页
Master and slave control of a Dual-stage for precision positioning
  • 所属机构名称：华中科技大学
  • 会议名称：3rd IEEE International Conference of Nano/Micro Engineered and Molecular Systems
  • 成果类型：会议
  • 会场：Sanya
  • 相关项目：二维平面电机复杂多变量耦合非线性动力学及控制研究
作者： Chen, Xuedong|Zhao, Hui|Zhang, Shangying|Bao, Xiulan|
同会议论文项目
二维平面电机复杂多变量耦合非线性动力学及控制研究
期刊论文 30 会议论文 9 专利 8 著作 1
同项目会议论文
Influences of the Restrictor Design Parameter and Operating Conditions of Aerostatic Bearings on its
Motion control of an ultra precision positioning stage
FE-based physical model of LPMBDCM for integrated motor drive system analysis
The dynamic modeling and dynamics response analysis of ultra-precision drive machine
Magnetic Field and Forces Analysis of Precision Linear Motor with Air-bearings
Identification Method for Transfer Function of Multi-DOFs Motion Stage
HIGH-FREQUENCY VIBRATIONS OF CORRUGATED CYLINDRICAL PIEZOELECTRIC SHELLS
Quantitative feedback control of a linear positioning stage with cogging force compensation