Effects of process parameters on the structure of hydrogenated amorphous carbon films processed by e
- 所属机构名称:西南交通大学
- 会议名称:10th International Workshop on Plasma-Based Ion Implantation and Deposition
- 成果类型:会议
- 会场:San Jose dos Campos, BRAZIL
- 相关项目:超高分子量聚乙烯表面沉积类金刚石薄膜改善耐磨性研究