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多弧－中频磁控溅射沉积Ti-Si-N结构与性能
  • 所属机构名称：武汉大学
  • 会议名称：2008全国荷电粒子源粒子束学术会议（哈尔滨）p. 184.
  • 成果类型：会议
  • 相关项目：加速器—电镜联机及其在材料科学中的应用
同会议论文项目
加速器—电镜联机及其在材料科学中的应用
期刊论文 65 会议论文 28
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