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Characterization of interfacial layer of DUV coatings by spectroscopic ellipsometry
  • 所属机构名称：中国科学院长春光学精密机械与物理研究所
  • 会议名称：2012 International Conference on Nanotechnology and Precision Engineering, ICNPE 2012
  • 时间：2013.1.20
  • 成果类型：会议
  • 相关项目：ArF激光薄膜抗激光损伤阈值与使用寿命预测研究
同会议论文项目
ArF激光薄膜抗激光损伤阈值与使用寿命预测研究
期刊论文 10 会议论文 7
同项目会议论文
Optical characterization of LaF3 by variable angle purged UV spectroscopic ellipsometry
Influence of ArF Laser Irradiation on Fused Silica at elevated fluencies
He-Ne散射探测用于ArF激光损伤在线判别
Laser induced damage threshold testing of DUV optical materials,Frontiers of Optical Coatings,2012.
Optical characterization of LaF3 by variable angle purged UV spectroscopic ellipsometry
Characterization of Interfacial Layer of DUV coatings by spectroscopic ellipsometry