Research on internal stress in electroplated Cu films on Fe substrates and Ni substrates-based on el
- 所属机构名称:河南科技大学
- 会议名称:2010 International Conference on Advances in Materials and Manufacturing Processes, ICAMMP 2010
- 成果类型:会议
- 会场:Shenzhen, China
- 相关项目:基于电子理论金属纳米晶体塑性变形机理及金属薄膜内应力形成机制研究与实验验证