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Material and Energy Efficiency Analysis of Low Pressure Chemical Vapor Deposition of TiO2 Film
  • 所属机构名称：大连理工大学
  • 会议名称：Proceedings of the 21st CIRP Conference on Life Cycle Engineering (LCE)
  • 时间：2014.6.18
  • 成果类型：会议
  • 相关项目：多尺度多场耦合的纳米TiO2薄膜制备精确能量模型研究
同会议论文项目
多尺度多场耦合的纳米TiO2薄膜制备精确能量模型研究
期刊论文 6 会议论文 6
同项目会议论文
Chemical Reaction Thermodynamic Model of Low Pressure CVD for Nano-TiO2 Film Preparation
Material and Energy Efficiency Analysis of Low Pressure Chemical Vapor Deposition of TiO2 Film.
Energy Consumption Assessment of Remanufacturing Processes
Exergy Analysis of Atomic Layer Deposition for Al2O3 Nano-film Preparation
Numerical Simulation on Motion and Diffusion of Carrier Gas Transport Process for Nano-TiO2 Films Pr