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Study on controlling the profile of holographic ion beam etching gratings
  • 所属机构名称：苏州大学
  • 会议名称：5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manu
  • 成果类型：会议
  • 相关项目：近红外波段堆垛结构三维光子晶体的制备和研究
作者： Liu Quan|Wang Hai-bin|Wu Jian-hong|Sun Peng|Qian Guo-lin|Wang Dan|
同会议论文项目
近红外波段堆垛结构三维光子晶体的制备和研究
期刊论文 2 会议论文 6 获奖 2 专利 5
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