Calculation and analysis for stiffness of the thrust aerostatic bearing of ultra-precision machine t
- 所属机构名称:哈尔滨工业大学
- 会议名称:5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Opt
- 时间:2010.4.4
- 成果类型:会议
- 相关项目:超精密加工工艺与装备