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High-density PMUT array for 3-D ultrasonic imaging based on reverse-bonding structure
  • 所属机构名称：清华大学
  • 会议名称：24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
  • 时间：2011
  • 成果类型：会议
  • 相关项目：集成化射频高Q薄膜体声波谐振器
作者： Wang, Yu-Feng|Ren, Tian-Ling|Yang, Yi|Chen, Hao|Zhou, Chang-Jian|Wang, Li-Gang|Liu, Li-Tian|
同会议论文项目
集成化射频高Q薄膜体声波谐振器
期刊论文 38 会议论文 17 专利 17
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