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Easy duplication of stamps using UV-cured fluoro-silsesquioxane for nanoimprint lithography
  • 所属机构名称：中国科学院光电技术研究所
  • 会议名称：52nd International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication
  • 成果类型：会议
  • 会场：Portland, OR
  • 相关项目：微电子学
作者： Fu, Peng-Fei|Pina-Hernandez, Carlos|Guo, L. Jay|
同会议论文项目
微电子学
期刊论文 5 会议论文 5
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