Mg-based multilayers and their thermal stabilities for EUV range
- 所属机构名称:同济大学
- 会议名称:Conference on Advances in Optical Thin Films IV
- 成果类型:会议
- 相关项目:X射线高分辨率多层膜设计、制作与检测方法研究
作者:
Zhu, Jingtao|Huo, Tonglin|Zhou, Sika|Li, Haochuan|Huang, Qiushi|Jiang, Li|Wang, Fengli|Zhang, Zhong|Wang, Zhanshan|Zhou, Hongjun|