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Influence of Heat Treatment on Hardness, Elastic Modulus and Bonding Strength of Ti/Ta/TiN/TaN Nanom
  • 所属机构名称：清华大学
  • 会议名称：5th China International Symposium on Tribology/1st International Tribology Symposium of IFToMM
  • 成果类型：会议
  • 会场：Beijing, PEOPLES R CHINA
  • 相关项目：微纳制造中的表面/界面行为及控制技术研究
作者： Shao, T. M.|Gong, H. F.|
同会议论文项目
微纳制造中的表面/界面行为及控制技术研究
期刊论文 66 会议论文 12 获奖 7
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