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ANOVA model based moving window approach for RtR control in high-mix semiconductor manufacturing ind
  • 所属机构名称：华中科技大学
  • 会议名称：The 2013 European Control Conference
  • 时间：2013.7.7
  • 成果类型：会议
  • 相关项目：带有度量时延的半导体制程基于数据的批间容错控制
作者： 凌丹|郑英|方华京|赵金|樊慧津|
同会议论文项目
带有度量时延的半导体制程基于数据的批间容错控制
期刊论文 5 会议论文 9
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