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Design and control of a decoupled two degree of freedom translation parallel micro-positioning stage
  • ISSN号：0034-6748
  • 期刊名称：Review of Scientific Instruments
  • 时间：2012
  • 页码：-
  • 相关项目：微/纳光学阵列元件的约束刻蚀剂层加工技术与系统的基础研究
作者： Lai LJ|Gu GY|Zhu LM|
同期刊论文项目
微/纳光学阵列元件的约束刻蚀剂层加工技术与系统的基础研究
期刊论文 45 会议论文 27
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