中文摘要：

为了提高微纳制造装备的定位精度,从提高桥架结构的刚度出发,以ANSYS软件为开发工具,提出了一种新型的拱形桥架结构。文中先从概念设计出发,设计出桥架机构的基本结构,然后利用ANSYS软件分析桥架的结构参数（如桥架厚度、立柱宽度、圆弧半径、斜面宽度和斜面高度）对刚度的影响,最终确定优化后的桥架模型。利用ANSYS软件对桥架结构进行静力分析和模态分析,通过对比不同设计方案的仿真结果,表明了新型桥架结构的优越性。

英文摘要：

In order to improve the positioning precision of micro-nano manufacturing equipment, this paper presents a new type of arch bridge structure through the optimization design with ANSYS software. By conceptual design, a basic struture in embryonic form is firstly provided. ANSYS software is then adoped to analyze the relationship between the structural stiffness and the structural parameters （ i. e. thickness and width of bridge, radius of circular arc, width and height of inclination）. For validation of the final bridge model, static analysis and modal analysis are carried out with ANSYS. By the comparison with different schemes, the proposed bridge model has better stiffness and little deformation.