基于已有的单圆孔电极液晶透镜的结构与设计方法,研制了新型的电控可变焦128元×128元液晶微透镜阵列。该面阵液晶微透镜使用氧化铟锡(ITO)玻璃作为上下基板,上电极通过光刻技术和盐酸腐蚀方法得到128元×128元圆孔阵列图案;下电极为ITO膜。上电极的圆孔阵列排列整齐,每个圆孔的直径为50μm,圆孔之间的间隔为100μm,夹在上下基板之间的液晶层的厚度为20μm。验证了该面阵液晶微透镜的光学特性,结果表明,在0.2~5.0 V(RMS),该面阵液晶微透镜的焦距为50~400μm,焦点的焦斑尺寸在10μm左右,点扩展函数值近似于理论数值。该面阵液晶微透镜的工作电压与焦距成反比,可以成清晰的多重像。
A new electrically driving and controlling 128 element× 128 element Liquid Crystal (LC) micro-lens array with tunable focal length is proposed based on the structure and design methods of a single circular hole electrode LC lens. The Indium Tin Oxide (ITO) glasses are used as the top and bottom substrates of the LC micro-lens array. The top electrode patterns containing 128 element× 128 element are obtained by a lithography and a hydrochloric acid etching,in which every element is a sin- gle circular hole of 50 μm diameter and the distance between the two circular holes is 100 t~m. The bottom electrode is just the ITO film. Furthermore, the thickness of LClayer between the top and the bottom electrodes is about 20 t~m and the focal length of the LC micro-lens array can be electrically tuned from 50μm to 400μm under the operating voltage from 0.2 V (RMS) to 5.0 V(RMS). The re- sult of the test indicates that the point spread function of the LC micro-lens array is close to the theory value,and the relationship of operating voltage and focal length is in an inverse proportion. These re- suits show that the imaging characteristic of the LC micro lens array can be comparable to those of the conventional optical micro-lens arrays.