中文摘要：

采用中频磁控溅射技术在单晶硅表面制备了钛硅多元掺杂的含氢类金刚石薄膜．在球一盘摩擦试验机上考察了不同气氛环境对薄膜摩擦学性能的影响．利用扫描电子显微电镜和拉曼光谱分析了磨损表面形貌和转移层结构，探讨了薄膜的摩擦磨损机理．结果表明：薄膜在真空和氮气环境下摩擦系数较小、磨损率低，表现为磨粒磨损；在氧气和高湿度大气环境下摩擦系数较大、磨损率高，表现为黏着磨损；在低湿度空气环境下薄膜摩擦系数最低，表现为磨粒磨损和黏着磨损混合磨损机理；转移层发生摩擦诱导石墨化和聚乙炔链C=C键双氢化两种摩擦化学过程．

英文摘要：

Ti, Si doped diamond- like carbon films were deposited on Si substrate by middle -frequency （MF） magnetron sputtering technique. The tribologieal properties of the film were investigated on a ball - on - disk tribometer in different atmosphere environments. The worn surfaces and transfer layer were observed and analyzed using a scanning electron microscope and Raman microscope. The friction and wear mechanisms of the film were also discussed. In vacuum or nitrogen environments, the wear rates of the film were much small, and the wear mechanism was mainly abrasive wear. In oxygen or high relative humidity air environments, the film exhibited much high friction coefficients and wear rates, and the wear mechanism was mainly adhesive wear. In low relative humidity air, the friction coefficient reached the minimum value. The film displayed a mixed wear mechanism of abrasive wear and adhesive wear. Raman spectra reveal that transfer layer appeared the tribochemical processes of friction - induced graphitization and dihydrogenated reaction of C=-C bonds of polyacetylen chains included into diamond-like carbon film.