中文摘要：

为设计性能优良的磁电阻传感单元,制作了一系列由不同宽度的单条GMR自旋阀磁电阻条所构成的传感器,并对并对它们的性能进行了测试。综合比较不同宽度传感器的矫顽力Hc、耦合场Hcof和线性范围Hrange,发现传感器最佳宽度为4μm,具有此宽度的传感器不仅线性区关于零场对称,而且矫顽力很小、线性范围很大,受弱磁场的影响很小。对由四个磁电阻条构成的惠斯通电桥传感器的钝化层设计采取了在传感器表面旋涂SU-8胶并在其电桥信号单元覆盖区开孔的办法,不仅满足了传感器在液体环境的测量要求,而且能够很好的区分传感器中的信号单元和参考单元。

英文摘要：

A series of sensors constructed by one single GMR spin valve stripe with different width was fabricated and measured in this paper.A comparison of their coercivity（Hc）,coupled field（Hcof）and linear range（Hrange）indicated that the sensor with a width of 4 μm demonstrated the best performance,for its linear range was on the zero-symmetric,in addition,its coercivity was so small and its linear range was so big that its resistance was basically not affected by weak magnetic field.The design of the passivation layer of the Wheatstone bridge Biosensor,which was constructed by four spin valve strips,adopted the approach by spinning coating of a SU-8 layer on the surface of the biosensor and holing on the specific region of the SU-8 below which was the sensor signal unit of the biosensor.In this way,the sensor can work in the liquid environment successfully and the signal unit and reference unit of the biosensor can be distinguished.