用飞秒激光在石英玻璃写入了光波导和光栅等结构。飞秒激光辐射照形成波导效应时的折射率改变量为0.001至0.008。折射率的改变量依赖于飞秒激光脉冲辐照的剂量和功率密度。通过Raman光谱和AFM图像,研究了波导区的物质结构变化,并对飞秒激光写入过程的物理机制进行了探讨。
Optical channel waveguides and gratings were successfully written inside the fused silica glass by focusing femtosecond(fs) pulse laser,respectively.The change of refractive index was determined to be 0.001 to 0.008 in the fused silica glass in waveguide regions.The refractive index change is dependent on both the dose of irradiation and the power density of the fs laser pulses.According to the Raman spectra and AFM image of the irradiated region,the physical mechanism of the writing process was discussed.