中文摘要：

采用磁控溅射方法在石英玻璃上制备了FePd（93nm）单层膜和FePd（46.5nm）/Ag（10nm）/FePd（46.5nm）多层膜,并在600℃退火不同时间,通过XRD、VSM对薄膜样品的结构和磁性能进行测量。结果发现：FePd单层膜在600℃退火240min后有序化转变不明显,300min后部分有序化,360min后基本上完全有序化,形成了有序面心四方结构的L10-FePd相;当热处理时间为420min时,有最大的面内矫顽力,约为1670Oe;Ag中间层对溅射态的FePd薄膜衍射峰的形成有抑制作用,Ag中间层的添加可大幅缩短FePd有序化的时间;样品热处理5min后就开始有序化,热处理15min后样品性能即可达到最好,有最大的面内矫顽力2660Oe,但热处理时间过长会使薄膜磁性能变差。

英文摘要：

FePd（93 nm）monolayer film and FePd（46.5 nm）/Ag（ 10 nm）/FePd（46.5 nm）multilayer film were deposited on glass by magnetron-controlled sputtering, annealed at 600℃ for different time, using X-ray diffraetometry （XRD） and VSM, the structure and magnetic properties of the films were analyzed. The results show that the ordering transformation of the films is not obvious when annealed at 600℃ for 240 min, parts of the films turns into ordering transformation for 300 min, the films turns ordering transition basically after annealed for 360 min ,then, the L10-FePd phase with ordered surface square structure can be obtained. When the heat treatment time is 420 min, the maximum coercive force in plane is about 1670 Oe. Ag interlayer has inhibitory effect to the formation of diffraction peaks of FePd thin films as sputtered.The addition of Ag interlayer can greatly shorten the ordering time of FePd .The sample after heat treatment for 5 min starts ordered.The sample performance is best as heat treatment for 15 min,and the maximum in-plane coercive is about 2660 Oe, but too long heat treatment time can make the magnetic performance of the films worse.