中文摘要：

大型高功率固体激光装置神光III中的48路强激光束组由许多大型精密光学系统组成,按照装置的研制要求实现这些光机系统的高精度装配是一项巨大的技术挑战。以具有亚微米级误差控制要求的大型反射镜组件为对象,提出了理论建模分析、数值计算仿真、工程现场试验研究三个层次相融合的反射镜组件装校精度分析研究方法。针对光机系统的装校精度建立几何误差传递和面形畸变形成的理论分析模型;并借助三维几何误差计算和结构有限元分析的专业化工具,分析预测了反射镜组件装配过程中的空间位姿误差以及夹持预紧作用下的镜面畸变作用;在工程环境下进行了反射镜组件的实体装配及其检测试验工作,检验了理论分析方法在实际工程中的适用性。这一方法对激光聚变装置中光机组件的精密装校研究有着普遍指导意义。

英文摘要：

It is a huge technical engineering challenge to realize the precise assembly of thousands large optical units in China＇s inertial confinement fusion system SG-III with 48 high power laser beams. Using the reflecting mirror unit as an example, a comprehensive methodology with an integration of theoretical modeling, numerical simulation and experimental study, is proposed. Theoretical modeling methods of tolerance stack-up and surface deflection are presented. Then using some powerful engineering software, ANSYS and 3DCS, both three dimensional assembly errors during mounting optics and surface deformation under fastening forces are analyzed and predicated. Finally, in a real optics assembly building, experiments are undertaken to verify the proposed methodology, and the results also solidify the methodology＇s feasibility. This method is promising to apply into more optics assembly studies in the inertial confinement fusion engineering.