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中文摘要：
半导体生产线是典型多重入复杂的制造系统，具有可重入性、复杂性、不确定性、多目标和多约束等特点，其优化调度问题是近年来控制领域的一个重要研究方向．本文根据近些年来这一研究方向上的主要研究成果，系统评述了国内外半导体生产线调度的建模方法和调度策略的研究进展，分析和讨论它们各自的主要优缺点和适用范围，简要介绍了重调度判定依据及所采用的方法，并指出半导体制造领域中值得进一步研究的一些问题和可能发展的方向．
英文摘要：
Semiconductor wafer fabrication is a class of typical re-entrant complicated manufacturing system,which has important characteristics such as re-entrant process flows, complexity, uncertainty, muir-objective and muir-constrain. Nowadays, optimized scheduling problem for wafer fabrication is an important research branch in the control. In this paper, the research progress of modeling methods and scheduling strategies for semiconductor wafer fabrication are systemically reviewed according to the main research achievements in recent years, and their primary virtues and deficiencies are also analyzed and discussed, furthermore, their applicable cope are also presented. On the other hand, the criterions and methods of rescheduling are briefly generalized. Some problems worthy of further study and probably developing trends in the semiconductor manufacturing field are presented.
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