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中文摘要：
介绍了一种利用波长为800nm的飞秒激光脉冲在普通单模光纤（SMF）上刻蚀出微型光纤法布里一珀罗干涉（MEFPI）传感器的方法。该方法通过计算机控制就可以进行任意腔长的微型光纤法布里一珀罗干涉传感器的制作。实验研究了光纤法布里一珀罗传感器的应变和温度特性，结果表明，在0～350με的应变范围内，干涉条纹波长相对于应变的灵敏度为0．006nm／με，线性度达99．69％；在20～100℃的温度范围内，该光纤法布里一珀罗传感器具有较小的负温度特性，干涉条纹往短波方向漂移了0．15nm。作为全光纤传感器件，该类型传感器重复性高，成本低廉，易于批量加工，在光传感领域具有较大的潜在应用价值。
英文摘要：
The fabrication of a micromachining extrinsic Fabry-Perot （F-P） interferometer （MEFPI） within a conventional single-mode fiber （SMF） by using a 800 nm femtosecond laser was reported in this paper. The strain and temperature characteristics of the MEFPI are investigated. The experimental results show that the strain sensitivity is 0. 006 nm/με, and linearity is 99. 69% at the range of 0 to 350 με. Furthermore, the interference fringe of the MEFPI shifts about 0.15 nm to the short wavelength while the temperature rises from 20℃ to 100 ℃. Such kind of in-fiber interference sensors has many advantages, such as compact size, good reliability, low cost, easy fabrication and mass-production, which offers great potential for sensing applications.
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