中文摘要：

探讨了曲面激光直写系统中的光焦点定位控制方法。曲面激光直写中光焦点的定位控制要求定位范围毫米级，而定位精度则在亚微米级，因此选用了宏／微双驱动系统。对宏／微双驱动系统进行了动力学建模，并进行了分析。探讨宏／微双驱动系统在直写光刻中的控制方法，对所设计的宏／微双驱动系统进行了实际的测试实验。结果表明：所设计的宏／微双驱动系统在曲面激光直写系统中是可行且有效的。

英文摘要：

This paper discusses the optical focus positioning control method in curved surface laser direct-writing system. As optical focus positioning control in curved surface laser directwriting requires millimeter-sized positioning range and submicron positioning accuracy, macro/micro dual-drive system is selected. This paper conducts dynamics modeling and analysis on macro/micro dual-drive system; introduces the control method of macro/micro dual-drive system in direct-writing photoetching and conducts a practical test on macro/micro dual drive system designed. The result shows that the macro/micro dual drive system designed is feasible and effective in curved surface laser direct-writing system.